论文标题
语音屏蔽的光子晶体镜膜，用于腔量子光学机械
Phononically shielded photonic-crystal mirror membranes for cavity quantum optomechanics
论文作者
论文摘要
我们提出了具有高机械质量因子的高度反射性，次波长厚的膜谐振器，并讨论了其对腔光力学的适用性。 $ 88.5〜 \ text {nm} $薄化学计量硅氮化膜，设计和制造，以结合2D光子和语音晶体图案，可在室温下达到$ 99.89〜 \％$ $ 99.89〜 \％$ $ 99.89〜 \％$。我们构建一个Fabry-Perot型光学腔，膜形成一个终止镜。空腔变速箱中的光束形状显示出与简单的高斯模式形状的明显偏差，与理论预测一致。我们展示了从室温开始的光学机械边带冷却至MK模式温度。在较高的腔内力量下，我们观察到一种光机电引起的光学双重性。所展示的设备有可能在理想的低光水平下达到高的合作。在腔体量子光学机械中，光学机电传感和挤压应用或基础研究，并满足冷却的要求，从室温到机械运动的量子基态。
We present a highly reflective, sub-wavelength-thick membrane resonator featuring high mechanical quality factor and discuss its applicability for cavity optomechanics. The $88.5~\text{nm}$ thin stoichiometric silicon-nitride membrane, designed and fabricated to combine 2D-photonic and phononic crystal patterns, reaches reflectivities up to $99.89~\%$ and a mechanical quality factor of $2.9 \times 10^7$ at room temperature. We construct a Fabry-Perot-type optical cavity, with the membrane forming one terminating mirror. The optical beam shape in cavity transmission shows a stark deviation from a simple Gaussian mode-shape, consistent with theoretical predictions. We demonstrate optomechanical sideband cooling to mK-mode temperatures, starting from room temperature. At higher intracavity powers we observe an optomechanically induced optical bistability. The demonstrated device has potential to reach high cooperativities at low light levels desirable for e.g. optomechanical sensing and squeezing applications or fundamental studies in cavity quantum optomechanics, and meets the requirements for cooling to the quantum ground state of mechanical motion from room temperature.
