论文标题
由原子层沉积在悬浮的2D材料上制造的纳米力学谐振器
Nanomechanical resonators fabricated by atomic layer deposition on suspended 2D materials
论文作者
论文摘要
原子层沉积（ALD）是一种合成超薄材料的逐层控制方法，比其他技术提供了各种优点，例如精确的厚度控制，大面积可伸缩性和出色的形式。在这里，我们证明了在悬浮的2D材料之上使用ALD增长来制造纳米力学谐振器的可能性。我们制造了由石墨烯/MOS $ _2 $异质结构组成的ALD纳米力学谐振器。使用AFM凹痕和Optothermal驱动器，我们测量了它们的机械性能，包括Young的模量，共振频率和质量因子，显示出与它们的去角质和化学蒸气沉积的值相似的值。我们还通过去角质来演示纳米力学谐振器的制造，而nbs $ _2 $层。这项研究体现了ALD技术产生高质量悬浮的纳米力学膜的潜力，从而为未来多层纳米电视和纳米机电系统提供了有希望的途径。
Atomic layer deposition (ALD), a layer-by-layer controlled method to synthesize ultrathin materials, provides various merits over other techniques such as precise thickness control, large area scalability and excellent conformality. Here we demonstrate the possibility of using ALD growth on top of suspended 2D materials to fabricate nanomechanical resonators. We fabricate ALD nanomechanical resonators consisting of a graphene/MoS$_2$ heterostructure. Using AFM indentation and optothermal drive, we measure their mechanical properties including Young's modulus, resonance frequency and quality factor, showing similar values as their exfoliated and chemical vapor deposited counterparts. We also demonstrate the fabrication of nanomechanical resonators by exfoliating an ALD grown NbS$_2$ layer. This study exemplifies the potential of ALD techniques to produce high-quality suspended nanomechanical membranes, providing a promising route towards high-volume fabrication of future multilayer nanodevices and nanoelectromechanical systems.
