论文标题
原子上的金属丝异质结构通过原子层沉积
Atomically Thin Metal-Dielectric Heterostructures by Atomic Layer Deposition
论文作者
论文摘要
在过去的几年中,异质结构越来越引起人们的注意,以实现各种光电和光子应用。在这项工作中,报道了与微呼舌技术兼容的IR/AL2O3异质结构的原子薄界面。它们的结构和光学特性通过光谱和显微镜技术(XRR,XPS,HRTEM,光谱椭圆法和UV/Vis/NIR NIR分光光度计)确定。 XRR和HRTEM分析揭示了原子量表异质结构中IR的逐层生长机理,这与金属在电介质上的典型岛型生长不同。与纳米颗粒的核心壳结构形成相反,XPS的研究暗示了IR浓度较低的界面处的IR-O-O-AL键形成。精确调整成分的比率可确保对分散曲线的控制以及从有效介电到金属异质结构的过渡。 IR涂层厚度的变化范围从几个在异质结构中约7 nm的膜变化。在包含约2-4 nm的单个IR涂层厚度的结构中观察到了过渡。此后,通过精确改变此类异质结构的组成,显示具有可调介电常数的Epsilon-near-Zero超材料的超材料。总体而言,针对IR/AL2O3异质结构的金属丝接口的结构和光学性质进行了全面研究,表明可用于光学系统设计的材料投资组合的扩展。
Heterostructures increasingly attracted attention over the past several years to enable various optoelectronic and photonic applications. In this work, atomically thin interfaces of Ir/Al2O3 heterostructures compatible with micro-optoelectronic technologies are reported. Their structural and optical properties were determined by spectroscopic and microscopic techniques (XRR, XPS, HRTEM, spectroscopic ellipsometry, and UV/VIS/NIR spectrophotometry). The XRR and HRTEM analyses reveal a layer-by-layer growth mechanism of Ir in atomic scale heterostructures, which is different from the typical island-type growth of metals on dielectrics. Alongside, XPS investigations imply the formation of Ir-O-Al bonding at the interfaces for lower Ir concentrations, in contrast to the nanoparticle core-shell structure formation. Precisely tuning the ratio of the constituents ensures the control of the dispersion profile along with a transition from effective dielectric to metallic heterostructures. The Ir coating thickness was varied ranging from a few Å to films of about 7 nm in the heterostructures. The transition has been observed in the structures containing individual Ir coating thicknesses of about 2-4 nm. Following this, show epsilon-near-zero metamaterials with tunable dielectric constants by precisely varying the composition of such heterostructures. Overall, a comprehensive study on structural and optical properties of the metal-dielectric interface of Ir/Al2O3 heterostructures was addressed indicating an extension of the material portfolio available for optical system design.