论文标题

通过部分电极机电阻抗光谱法确定的单个α-Quartz晶体的弹性,压电系数和内部摩擦

Elastic, piezoelectric coefficients, and internal frictions of a single alpha-quartz crystal determined by partial-electrode electromechanical impedance spectroscopy

论文作者

Xie, Mingyu, Bai, Wenshuo, Li, Faxin

论文摘要

在这项工作中,使用我们最近提议的25厘米处的单个α-Quartz晶体的所有独立弹性系数,压电系数和单个α-Quartz晶体的内部摩擦确定。在PE-EMIS中,矩形并行凝集的石英样品具有在拐角处制造的两个小部分电极。在真正的自由边界条件下,通过阻抗分析仪测量的电导光谱(相当于共振光谱)是无嘈杂的,可以准确拟合50至310kHz的前100个特征模型。为了避免模式错误识别,使用扫描的激光振动仪确定石英样品的平面外位移分布。还提出了使用类似商业三明治的RUS设备测量的谐振光谱进行比较,结果表明,类似三明治的RUS中的夹紧力会改变样品的共振频率,分别导致13%和75%的过度刺激,以分别对地压系数E11和E14。与RUS相比,我们提出的PE-EMIS更有效,更方便,将被广泛用于表征压电晶体。

In this work, all the independent elastic coefficients, piezoelectric coefficients, and internal frictions of a single alpha-quartz crystal are determined using our recently proposed partial-electrode electromechanical impedance spectroscopy (PE-EMIS) at 25 centigrade. In PE-EMIS, the rectangular parallelepiped quartz sample with two small partial electrodes fabricated on a corner is self-excited/sensed. The conductance spectrum (equivalent to the resonance spectrum) measured by an impedance analyzer under a true free boundary condition is noiseless, allowing the first 100 eigenmodes ranging from 50 to 310kHz to be accurately fitted. To avoid mode misidentification, the off-plane displacement distributions of the quartz sample under different eigenmodes are determined using a scanned-laser vibrometer. The resonance spectrum measured using a commercial sandwich-like RUS apparatus is also presented for comparison, and the results show that the clamping force in sandwich-like RUS shifts the sample's resonance frequencies, causing 13% and 75% overestimations for the piezoelectric coefficients e11 and e14, respectively. In comparison to the RUS, our proposed PE-EMIS is more effective and convenient, and will be widely used for characterization of piezoelectric crystals.

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