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Emerging communication and cryptography applications call for reliable, fast, unpredictable random number generators. Quantum random number generation (QRNG) allows for the creation of truly unpredictable numbers thanks to the inherent randomness available in quantum mechanics. A popular approach is using the quantum vacuum state to generate random numbers. While convenient, this approach was generally limited in speed compared to other schemes. Here, through custom co-design of opto-electronic integrated circuits and side-information reduction by digital filtering, we experimentally demonstrated an ultrafast generation rate of 100 Gbps, setting a new record for vacuum-based quantum random number generation by one order of magnitude. Furthermore, our experimental demonstrations are well supported by an upgraded device-dependent framework that is secure against both classical and quantum side-information and that also properly considers the non-linearity in the digitization process. This ultrafast secure random number generator in the chip-scale platform holds promise for next generation communication and cryptography applications.