论文标题
宽带激光束扫描的微磁管综合光子电路
Microcantilever-integrated photonic circuits for broadband laser beam scanning
论文作者
论文摘要
激光束扫描是许多应用的核心，包括显示，显微镜，三维映射和量子信息。将扫描仪减少为微芯片形式，这促使了光段阵列和焦平面切换阵列的非常大规模的光子集成电路的发展。同时实现紧凑的占地面积，广泛的波长操作和低功耗的挑战仍然是一个突出的挑战。在这里，我们介绍了满足这些要求的激光束扫描仪。使用嵌入氮化硅纳米光子电路的微型磁场，我们展示了宽带，一维光转向，波长为410 nm至700 nm。微型管理器的超型〜0.1毫米$^2 $区域，消耗〜31至46兆瓦的功率，易于控制，并发出单光束。微型管理器是单层集成在200毫米硅晶片上的活动光子平台中的。微型管理器集成的光子电路小型化并简化了光线投影仪，以实现多功能，功率效率和宽带激光扫描仪微芯片。
Laser beam scanning is central to many applications, including displays, microscopy, three-dimensional mapping, and quantum information. Reducing the scanners to microchip form factors has spurred the development of very-large-scale photonic integrated circuits of optical phased arrays and focal plane switched arrays. An outstanding challenge remains to simultaneously achieve a compact footprint, broad wavelength operation, and low power consumption. Here, we introduce a laser beam scanner that meets these requirements. Using microcantilevers embedded with silicon nitride nanophotonic circuitry, we demonstrate broadband, one- and two-dimensional steering of light with wavelengths from 410 nm to 700 nm. The microcantilevers have ultracompact ~0.1 mm$^2$ areas, consume ~31 to 46 mW of power, are simple to control, and emit a single light beam. The microcantilevers are monolithically integrated in an active photonic platform on 200-mm silicon wafers. The microcantilever-integrated photonic circuits miniaturize and simplify light projectors to enable versatile, power-efficient, and broadband laser scanner microchips.
