论文标题
可见的近红外混合动力$β$ -ta/nbtin动力学电感探测器的分辨能力
Resolving Power of Visible to Near-Infrared Hybrid $β$-Ta/NbTiN Kinetic Inductance Detectors
论文作者
论文摘要
动感探测器（儿童）是超导能量溶解的探测器，对从近红外到紫外线的单个光子敏感。我们研究了由Beta相触觉（$β$ -TA）电感器和NBTIN相互插入电容器（IDC）组成的混合孩子设计。设备显示平均固有质量因子$ q_i $ of 4.3 $ \ times10^5 $ $ \ pm $ 1.3 $ \ times10^5 $。为了增加光敏感应器捕获的功率，我们在Sapphire基板的背面3D打印150美元$ \ times $ 150 $ $ m $ m $ m $ m $ m $ m $ $ \ \ \ $ \ \ \ \ \ \ \ \ 3D的功能。设计和印刷镜头之间的形状偏差小于1 $μ$ m，并且此过程的对齐精度为$δ_x= +5.58 \ pm 0.5 $ $ $ $ $ m和$Δ_y= +8.3 \ pm 3.3 $ $ $ $ $ m。我们测量1545-402 nm的解决功率，在孩子的相反应中限制为4.9。我们可以与光子事件产生的准粒子数量的演变对相响应中的饱和度进行建模。具有线性响应的替代坐标系在402 nm处将分辨能力提高到5.9。我们使用激光源和单色仪通过两行测量来验证测得的分辨能力。我们讨论了可以在通向具有高分辨率的孩子阵列的途径上对设备进行的一些改进。
Kinetic Inductance Detectors (KIDs) are superconducting energy-resolving detectors, sensitive to single photons from the near-infrared to ultraviolet. We study a hybrid KID design consisting of a beta phase tantalum ($β$-Ta) inductor and a NbTiN interdigitated capacitor (IDC). The devices show an average intrinsic quality factor $Q_i$ of 4.3$\times10^5$ $\pm$ 1.3 $\times10^5$. To increase the power captured by the light sensitive inductor, we 3D-print an array of 150$\times$150 $μ$m resin micro lenses on the backside of the sapphire substrate. The shape deviation between design and printed lenses is smaller than 1$μ$m, and the alignment accuracy of this process is $δ_x = +5.8 \pm 0.5$ $μ$m and $δ_y = +8.3 \pm 3.3$ $μ$m. We measure a resolving power for 1545-402 nm that is limited to 4.9 by saturation in the KID's phase response. We can model the saturation in the phase response with the evolution of the number of quasiparticles generated by a photon event. An alternative coordinate system that has a linear response raises the resolving power to 5.9 at 402 nm. We verify the measured resolving power with a two-line measurement using a laser source and a monochromator. We discuss several improvements that can be made to the devices on a route towards KID arrays with high resolving powers.
