论文标题
通过纳米力机弦谐振器的本本特征光谱来确定杨氏模量
Determining Young's modulus via the eigenmode spectrum of a nanomechanical string resonator
论文作者
论文摘要
我们提出了一种对纳米力机弦谐振器的杨氏模量的原位测定的方法。它依赖于测量大量的谐波本征模，即使在压力为主的频率响应的情况下，也可以访问Young的模量。我们使用所提出的框架获得了四种不同晶圆材料的杨氏模量，包括三种不同的材料平台非晶硅氮化硅，晶体碳化硅和磷化磷脂的结晶。将所得的值与可用的理论和文献值进行比较，揭示了需要测量所研究样本材料对精确装置表征的样本材料的模量。
We present a method for the in-situ determination of Young's modulus of a nanomechanical string resonator subjected to tensile stress. It relies on measuring a large number of harmonic eigenmodes and allows to access Young's modulus even for the case of a stress-dominated frequency response. We use the proposed framework to obtain the Young's modulus of four different wafer materials, comprising the three different material platforms amorphous silicon nitride, crystalline silicon carbide and crystalline indium gallium phosphide. The resulting values are compared with theoretical and literature values where available, revealing the need to measure Young's modulus on the sample material under investigation for precise device characterization.
