论文标题

测试站通过(TSV)启用应用程序特定的集成电路(ASIC)快速筛选用于硬X射线成像检测器

Testing Station for Fast Screening of Through Silicon Via (TSV)-enabled Application Specific Integrated Circuits (ASICs) for Hard X-ray Imaging Detectors

论文作者

Violette, Daniel P., Allen, Branden, Hong, Jaesub, Miyasaka, Hiromasa, Grindlay, Jonathan

论文摘要

特定于应用程序特定的集成电路(ASIC)用于空间传播仪器中,用于信号处理和检测器读数。这些ASIC到前端印刷电路板(PCB)的电气接口通常是通过电线键完成的。通过硅Via(TSV)技术已被提出作为一种替代互连技术,该技术将通过用翻转芯片键合代替电线粘结来降低ASIC包装的组装复杂性。 TSV技术在大型检测器阵列中是有利的,在大型检测器阵列中,TSV可以在各个方面构成近距离检测器铺平。 TSV ASIC的晶圆级探测卡测试被引入ASIC表面上的焊球挫败了,以进行打芯片键合,以阻碍对齐。因此,我们开发了ASIC测试架(ATS),以实现个人ASIC死亡的快速筛选和表征。我们成功地证明了最初是针对核光谱和望远镜阵列(Nustar)任务上CDZNTE探测器开发的ATS操作,后来在通过持久过程中用TSV进行了修改。我们测试了后侧盲-TSV和前侧通过TSV,其结果是内部测试脉冲器测量结果,这些测量表明性能等于或超过探针卡晶圆晶片级测试数据。可以轻松扩展或重复ATS,以便对ASIC筛选进行ASIC筛选,以便对未来太空程序的大面积成像探测器进行平行。

Application Specific Integrated Circuits (ASICs) are used in space-borne instruments for signal processing and detector readout. The electrical interface of these ASICs to frontend printed circuit boards (PCBs) is commonly accomplished with wire bonds. Through Silicon Via (TSV) technology has been proposed as an alternative interconnect technique that will reduce assembly complexity of ASIC packaging by replacing wire bonding with flip-chip bonding. TSV technology is advantageous in large detector arrays where TSVs enable close detector tiling on all sides. Wafer-level probe card testing of TSV ASICs is frustrated by solder balls introduced onto the ASIC surface for flip-chip bonding that hamper alignment. Therefore, we developed the ASIC Test Stand (ATS) to enable rapid screening and characterization of individual ASIC die. We successfully demonstrated ATS operation on ASICs originally developed for CdZnTe detectors on the Nuclear Spectroscopic and Telescope Array (NuSTAR) mission that were later modified with TSVs in a via-last process. We tested both back-side blind-TSVs and front-side through-TSVs, with results from internal test pulser measurements that demonstrate performance equal to or exceeding the probe card wafer-level testing data. The ATS can easily be expanded or duplicated in order to parallelize ASIC screening for large area imaging detectors of future space programs.

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