论文标题
宽带单模式平面波导在整体4H-SIC中
Broadband single-mode planar waveguides in monolithic 4H-SiC
论文作者
论文摘要
碳化硅的色彩中心缺陷有望在多个领域(例如计算,传感和通信)中的光电量子应用。为了缩小并将这些功能与现有的硅设备平台相结合,考虑SIC集成光学器件至关重要。近年来,已经显示了许多SIC光子平台的示例,例如光子晶体腔,膜片中的波导和微环共振器。但是,所有这些示例都依赖于将SIC的薄膜与底物晶片分开。这引入了材料中明显的表面粗糙度,应变和缺陷,这极大地影响了颜色中心的光学性质的同质性。在这里,我们介绍并测试了一种在SIC:通过电荷载体浓度调整光学性能中制造单层单晶集成型器件的方法。我们制造了整体式的N-I-N和P-I-N连接,其中内在层充当波导核,并证明了这些样品的波导功能。传播损失低于14 dB/cm。这些波导类型允许在宽波长范围内以低应变诱导的光学转换频率不均匀性来解决色彩中心。此外,我们希望我们的发现为基于P-I-N连接的制造波导和设备的道路开辟了道路,这将允许集成的静电和射频(RF)控制以及对碳化硅缺陷的高强度光学控制。
Color-center defects in silicon carbide promise opto-electronic quantum applications in several fields, such as computing, sensing and communication. In order to scale down and combine these functionalities with the existing silicon device platforms, it is crucial to consider SiC integrated optics. In recent years many examples of SiC photonic platforms have been shown, like photonic crystal cavities, film-on-insulator waveguides and micro-ring resonators. However, all these examples rely on separating thin films of SiC from substrate wafers. This introduces significant surface roughness, strain and defects in the material, which greatly affects the homogeneity of the optical properties of color centers. Here we present and test a method for fabricating monolithic single-crystal integrated-photonic devices in SiC: tuning optical properties via charge carrier concentration. We fabricated monolithic SiC n-i-n and p-i-n junctions where the intrinsic layer acts as waveguide core, and demonstrate the waveguide functionality for these samples. The propagation losses are below 14 dB/cm. These waveguide types allow for addressing color-centers over a broad wavelength range with low strain-induced inhomogeneity of the optical-transition frequencies. Furthermore, we expect that our findings open the road to fabricating waveguides and devices based on p-i-n junctions, which will allow for integrated electrostatic and radio frequency (RF) control together with high-intensity optical control of defects in silicon carbide.