论文标题
高速加速精确运动系统的主动控制轻型结构的控制共同设计
Control Co-design of Actively Controlled Lightweight Structures for High-acceleration Precision Motion Systems
论文作者
论文摘要
精确运动阶段是广泛制造设备的重要组成部分，其运动性能对于系统的质量和吞吐量至关重要。在各种过程中，对更高的制造吞吐量的需求急剧增加，需要减少移动重量和高控制带宽的下一代运动系统的发展。但是，减少移动阶段的重量可以降低舞台的结构共振频率，从而使硬件动力学和控制器设计问题强烈耦合。针对这一挑战，本文提出了一种嵌套硬件和控制共同设计框架的新公式，以进行精确运动阶段。提出的框架可以通过保证的鲁棒性明确优化闭环控制带宽，并明确考虑物理系统中的限制。两项案例研究，包括使用集总参数机械系统和有限元模拟的轻质运动阶段的激励示例，用于评估所提出的嵌套CCD框架的有效性。仿真结果表明，与顺序设计基线相比，提出的嵌套CCD框架具有减轻重量的42 \％\％\％的带宽改进，这证明了所提出的方法的功效。
Precision motion stages are an essential part of a wide range of manufacturing equipment, and their motion performance are critical to the quality and throughput of the systems. The drastically increasing demand for higher manufacturing throughput in various processes necessities the development of next-generation motion systems with reduced moving weight and high control bandwidth. However, the reduction of moving stage's weight can lower the stage's structural resonance frequencies, making the hardware dynamics and controller design problem strongly coupled. Aiming at this challenge, this paper proposes a new formulation of nested hardware and control co-design framework for precision motion stages. The proposed framework explicitly optimizes the closed-loop control bandwidth with guaranteed robustness, and explicitly considers the limits in the physical system. Two case studies, including a motivating example using lumped-parameter mechanical system and a finite-element-simulated lightweight motion stage, are being used to evaluate the effectiveness of the proposed nested CCD framework. Simulation results show that the proposed nested CCD framework has 42\% of weight reduction and 28\% bandwidth improvement compared with a sequential design baseline, which demonstrates the efficacy of the proposed approach.
