论文标题
提高原子力显微镜的灵敏度对平面片上芯片探针的敏感性
Enhancing sensitivity in atomic force microscopy for planar tip-on-chip probes
论文作者
论文摘要
我们提出了一种新的方法来调整基于叉子的原子力显微镜，以利用具有高灵敏度和广泛兼容性的先进的“芯片上的尖端”探针。通常，这种类似芯片的探针的大小达到2 mm x 2 mm，急剧扰动调音叉的振荡，导致其内在力传感的性能较差。因此，恢复初始振荡特征对于恢复高灵敏度是必要的。为此，我们开发了一种新的方法，该方法包括三个基本步骤：调整叉重平衡，修改持有人 - 传感器固定和电极重新配置。质量重新平衡允许调谐叉恢复频率并在超高真空条件下在空气中最高10E4的高Q因子值，最多可达4 x 10E4。使用软线的浮动架固定可显着减少安装元素中的能量耗散。与软线相结合，重新配置的电极可提供对类似芯片的探针的电气通道，而无需干预力传感信号。最后，我们易于实现的方法允许将原子力显微镜尖端从被动工具转换为具有扩展功能的专用微电位。
We present a new approach to tuning fork-based atomic force microscopy for utilizing advanced "tip-on-chip" probes with high sensitivity and broad compatibility. Usually, such chip-like probes with a size reaching 2 mm x 2 mm drastically perturb the oscillation of the tuning fork, resulting in poor performance in its intrinsic force sensing. Therefore, restoring initial oscillatory characteristics is necessary for regaining high sensitivity. To this end, we developed a new approach consisting of three basic steps: tuning fork rebalancing, revamping holder-sensor fixation, and electrode reconfiguration. Mass rebalancing allows the tuning fork to recover the frequency and regain high Q-factor values up to 10E4 in air and up to 4 x 10E4 in ultra-high vacuum conditions. The floating-like holder-fixation using soft wires significantly reduces energy dissipation from the mounting elements. Combined with the soft wires, reconfigured electrodes provide electrical access to the chip-like probe without intervening in the force-sensing signal. Finally, our easy-to-implement approach allows converting the atomic force microscopy-tip from a passive tool to a dedicated microdevice with extended functionality.
