论文标题
整体硅碳化物金属
Monolithic Silicon Carbide Metalenses
论文作者
论文摘要
碳化硅已成为量子光子和非线性光学元件的有前途的材料平台。这些特性使高质量硅碳化物中综合光子成分的发展成为促进可扩展芯片网络的关键方面。在这项工作中，我们在数值上设计，制造和演示了适合片上光学操作的SIC的整体金属的性能。我们设计了两个不同的镜头，具有抛物线和立方相剖面，在近红外光谱范围内运行，这对于量子和光子应用非常感兴趣。我们通过光学传输测量并表征透镜的焦点来支持透镜制造。我们的结果将加速SIC纳米光子设备的开发，并有助于与元素组件的量子发射器的芯片整合。
Silicon carbide has emerged as a promising material platform for quantum photonics and nonlinear optics. These properties make the development of integrated photonic components in high-quality silicon carbide a critical aspect for the advancement of scalable on-chip networks. In this work, we numerically design, fabricate and demonstrate the performance of monolithic metalenses from SiC suitable for on-chip optical operations. We engineer two distinct lenses, with parabolic and cubic phase profiles, operating in the near infrared spectral range, which is of interest for quantum and photonic applications. We support the lens fabrication by optical transmission measurement and characterize the focal points of the lenses. Our results will accelerate the development of SiC nanophotonic devices and aid in an on chip integration of quantum emitters with meta-optical components.
