论文标题
单层整合的波导偶联单频微叠型在掺杂的薄膜锂锂锂
Monolithically integrated waveguide-coupled single-frequency microlaser on erbium-doped thin film lithium niobate
论文作者
论文摘要
我们克服了使用光刻辅助化学机械蚀刻（位置）技术集成在掺杂Erbium掺杂的薄膜（ER：TFLN）上的单层波导偶联的微孔激光器（ER：TFLN）的困难。我们展示了在1531 nm波长左右运行的集成单频微孔激光器。因此，可以使用该地点技术，即具有低传播损失的集成ER：TFLN光子学，可用于实现单层片上微型塑料的低成本质量产生，其应用范围从光学通信和光子整合电路（PIC）到精确的衡量标准和大规模传感。
We overcome the difficulty in realizing a monolithic waveguide-coupled microring laser integrated on erbium-doped thin film lithium niobate (Er: TFLN) using photolithography assisted chemo-mechanical etching (PLACE) technique. We demonstrate an integrated single-frequency microring laser operating around 1531 nm wavelength. The PLACE technique, enabling integrated Er: TFLN photonics with low propagation loss, can thus be used to realize low cost mass production of monolithic on-chip microlasers with applications ranging from optical communication and photonic integrated circuit (PIC) to precision metrology and large-scale sensing.
