论文标题
双极化多路复用无定形SI：h光子光子发射器的光栅耦合器，在线的光子BICMOS后端
Dual-polarization multiplexing amorphous Si:H grating couplers for silicon photonic transmitters in the photonic BiCMOS backend of line
论文作者
论文摘要
我们报告了在无定形Si：H上结合2D光栅耦合器（2D GC）的极化，在光子BICMOS平台的后端制造。 2D GC可以用作混合硅光子相干发射器的接口，该发射器可以在散装的Si Wafers上实现。制造的2D GC在电信C波段中运行，并显示-5 dB的实验耦合效率，晶圆变化为+/- 1.2 dB。概述了未来设计几代的效率提高和提高性能稳定性的可能性，还研究了向O波段设备的扩展。
We report on polarization combining 2D grating couplers (2D GCs) on amorphous Si:H, fabricated in the backend of line of a photonic BiCMOS platform. The 2D GCs can be used as an interface of a hybrid silicon photonic coherent transmitter, which can be implemented on bulk Si wafers. The fabricated 2D GCs operate in the telecom C-band and show an experimental coupling efficiency of -5 dB with a wafer variation of +/-1.2 dB. Possibilities for efficiency enhancement and improved performance stability in future design generations are outlined and extension towards O-band devices is investigated as well.
