论文标题
ITO薄膜的结构，电气和光学特性及其对CDS/CDTE薄膜太阳能电池性能的影响
Structure, Electrical and Optical Properties of ITO Thin Films and their Influence on Performance of CdS/CdTe Thin-Film Solar Cells
论文作者
论文摘要
在通过固态反应方法混合渐变的TiO2和SNO2粉末的情况下，准备了ITO。使用电子束枪技术，制备了不同厚度的ITO膜。研究了膜厚度对结构，电气和光学特性的影响。利用XRD图案来确定具有不同厚度的ITO的结构参数（晶格应变和晶体大小）。可以观察到，随着膜厚度的增加，平均水晶尺寸会增加，但晶格应变减少。 SEM表明，随着膜厚度的增加，ITO的晶粒尺寸增加和改善。通过标准的四点探针方法测量具有不同厚度的ITO膜的电性能。可以看出，随着ITO膜的厚度从75 nm增加到325 nm，电阻率从29x10^-4 ohm/cm降至1.65x10^-4 ohm/cm。这意味着具有较低电气性能的ITO膜更适合于高效的CDTE太阳能电池。使用三个光学层模型（ITO膜/表面粗糙度层的底物/B型层的粘合剂层）用于用高精度椭圆法计算膜厚度。在较高的t（lambda）和r（lambda）吸收区域中，确定吸收系数以计算光能隙，该光学隙从3.56 eV增加到3.69 eV。最后，还研究了各种厚度的ITO层对CD/CDTE太阳能电池性能的影响。当ITO窗口层的厚度为325 nm时，VOC = 0.82 V，JSC = 17 mA/cm2，FF = 57.4％，最高功率转换效率（PCE）为8.6％。
In terms of mixing graded TiO2 and SnO2 powders by solid-state reaction method, ITO was prepared. Using electron beam gun technology, ITO films with different thicknesses were prepared. The influence of film thickness on structure, electrical and optical properties was studied. The XRD patterns were utilized to determine the structural parameters (lattice strain and crystallite size) of ITO with different thicknesses. It is observed that the average crystallite size increases as the film thickness increases, but the lattice strain decreases. SEM shows that as the film thickness increases, the grain size of ITO increases and improves. The electrical properties of ITO films with different thicknesses were measured by the standard four-point probe method. It can be seen that as the thickness of the ITO film increases from 75 nm to 325 nm, the resistivity decreases from 29x10^-4 Ohm/cm to 1.65x10^-4 Ohm/cm. This means that ITO films with lower electrical properties will be more suitable for high-efficiency CdTe solar cells. Three optical layer models (adhesive layer of the substrate/B-spline layer of ITO film/surface roughness layer) are used to calculate the film thickness with high-precision ellipsometry. In the higher T(lambda) and R(lambda) absorption regions, the absorption coefficient is determined to calculate the optical energy gap, which increases from 3.56 eV to 3.69 eV. Finally, the effects of ITO layers of various thicknesses on the performance of CdS/CdTe solar cells are also studied. When the thickness of the ITO window layer is 325 nm, Voc = 0.82 V, Jsc = 17 mA/cm2, and FF = 57.4%, the highest power conversion efficiency (PCE) is 8.6%.
