论文标题
电容耦合的RF复合物等离子体中的昏暗和明亮的空隙状态
Dim and bright void regimes in capacitively-coupled RF complex plasmas
论文作者
论文摘要
我们通过实验证明，电容耦合的RF复合物等离子体中的空隙可以在两个定性的不同方向上存在。 “亮”空隙的特征是与空隙相关的亮等离子体发射，而“昏暗”空隙没有可检测到的发射特征。从昏暗状态到明亮机制的过渡是随着排放能力的增加而发生的，并且具有不连续的特征。不连续性在空隙尺寸功率依赖性中的扭结表现出来。我们通过简化的时间平均1D流体模型重现了明亮的空隙（由于离子阻力和静电力的平衡而机械稳定）。为了重现昏暗的空隙，我们人为地包括径向离子扩散到离子的连续性方程中，该方程可机械稳定由于非常弱的静电力而导致的空隙边界。空隙边界上的电场却很小，以至于根据实验观察，它不会引起与空隙相关的发射特征。
We demonstrate experimentally that the void in capacitively-coupled RF complex plasmas can exist in two qualitative different regimes. The "bright" void is characterized by bright plasma emission associated with the void, whereas the "dim" void possesses no detectable emission feature. The transition from the dim to the bright regime occurs with an increase of the discharge power and has a discontinuous character. The discontinuity is manifested by a kink in the void size power dependencies. We reproduce the bright void (mechanically stabilized due to the balance of ion drag and electrostatic forces) by a simplified time-averaged 1D fluid model. To reproduce the dim void, we artificially include the radial ion diffusion into the continuity equation for ions, which allows to mechanically stabilize the void boundary due to very weak electrostatic forces. The electric field at the void boundary occurs to be so small that it, in accordance with the experimental observation, causes no void-related emission feature.
