论文标题
ALSCN中的铁电性：切换，烙印和低于150 nm的胶片
Ferroelectricity in AlScN: Switching, Imprint and sub-150 nm Films
论文作者
论文摘要
ALSCN中铁电性的发现允许首先清楚地观察到Wurtzite晶体结构中的效果，从而产生了一种材料，具有以前前所未有的强制性田（2-5 mV/cm）和残余极化（70-110 $ C/c/c/c/cmm $^2 $）的材料。我们获得了对ALSCN的开关动力学的初步洞察力，这表明域壁运动有限从电极接口进行。此外，通常在ALSCN膜中观察到烙印，并可以暂时追溯到带电缺陷与内部和外部极化和场的比对。从应用的角度来看，在厚度低于30 nm的薄膜中可以观察到铁电性的潜在至关重要 - 因为发现ALSCN的强制场很大程度上与600 nm至27 nm之间的厚度无关。
The discovery of ferroelectricity in AlScN allowed the first clear observation of the effect in the wurtzite crystal structure, resulting in a material with a previously unprecedented combination of very large coercive fields (2-5 MV/cm) and remnant polarizations (70-110 $μ$C/cm$^2$). We obtained initial insight into the switching dynamics of AlScN, which suggests a domain wall motion limited process progressing from the electrode interfaces. Further, imprint was generally observed in AlScN films and can tentatively be traced to the alignment of charged defects with the internal and external polarization and field, respectively. Potentially crucial from the application point of view, ferroelectricity could be observed in films with thicknesses below 30 nm - as the coercive fields of AlScN were found to be largely independent of thickness between 600 nm and 27 nm.
