学术文献库

Target temperature in magnetron sputtering systems is a significant parameter which not only affects the physical and chemical properties of the deposited film but also stimulates the reactive sputtering process. Therefore, it is of great interest to establish a relationship between the target temperature and other parameters of magnetron sputtering process such as the gas pressure and the discharge power. This paper is devoted to the experimental and numerical studies on titanium target temperature in Argon medium. Numerical simulations for the target temperature are performed by solving the Heat equation for the magnetron sputtering system enclosed in Argon filled chamber. The simulations are compared with the experimental temperature data. The difference between the simulated results and experimental data on the power dependence of target temperature is explained by an empirical model of heat transfer from the ions to the gas.