论文标题
宽带极端紫外线多层设计中的多目标优化
Multiobjective optimization in design of broadband extreme ultraviolet multilayers
论文作者
论文摘要
为了设计具有许多目标的宽带极端紫外线多层，具有参考方向的多主体遗传算法和具有参考方向的多目标遗传学算法。通过分析非主导解决方案的分布，已经找到了具有关键平均反射率的多层设计，从而获得了三个主要设计目标之间的某些冲突关系。基于具有参考方向的多物体遗传学算法，通过引导在所需的解决方案空间区域中进行搜索获得了确切的多层设计。我们的方法可以提供多层设计，这些设计是这些设计目标中最佳的权衡取舍，并且它具有设计具有更多目标的光学多层的巨大潜力。
In order to design broadband extreme ultraviolet multilayers with many objectives, the multiobjective genetic algorithm and the multiobjective genetics algorithm with reference direction have been improved and combined used. The certain conflicting relations between three primary design objectives have been obtained by analyzing the distribution of nondominated solutions, and the multilayer designs with critical average reflectivities have been found. Basing on the multiobjective genetics algorithm with reference direction, the exact multilayer design has been obtained by guiding the searching in desired region of solution space. Our method can supply the multilayer designs which are the optimal trade-offs among these design objectives, and it has a great potential in designing optical multilayers with more objectives.
