论文标题
基于悬浮的2D材料的纳米机电传感器
Nanoelectromechanical Sensors based on Suspended 2D Materials
论文作者
论文摘要
二维（2D）材料的独特特性和原子厚度使具有新功能的较小且更好的纳米电机力学传感器。在过去的十年中，许多研究成功地表明了在压力传感器，麦克风，加速度计以及质量和质量和气体传感器中使用2D材料的悬浮膜的可行性。在这篇评论中，我们解释了不同的感应概念，并概述了相关的材料属性，制造路线和设备操作原理。最后，我们讨论了传感器读数和集成方法，并提供了与艺术状态的比较，以表明2D基于2D基于材料的纳米机械感应的挑战和承诺。
The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and device operation principles. Finally, we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.
