论文标题
光子原子探针耦合3D原子尺度分析与原位光致发光光谱法
A Photonic Atom Probe coupling 3D Atomic Scale Analysis with in situ Photoluminescence Spectroscopy
论文作者
论文摘要
激光增强了激光辅助原子探针断层扫描（LA-APT）中表面原子的场蒸发，可以同时激发半导体或绝缘样品中的PhtotoLumumeencence。配备有适当焦点和收集光学的原子探针已与原位的微型发光（μPL）台式结合，可以在适当分析过程中进行操作。我们开发的光子原子探针仪器以高达500 kHz的频率运行，并由150 FS激光脉冲在较大的光谱范围内调节（从深紫外线到附近IR）进行调节。使用配备有CCD摄像头的320毫米焦距光谱仪进行微PL光谱仪，用于时间整合，并配有条纹摄像头，以进行时间分辨。该仪器在多量子井氧化物异质结构样本上的应用典范说明了这种新一代的层析成像原子探针的潜力。
Laser enhanced field evaporation of surface atoms in Laser-assisted Atom Probe Tomography (La-APT) can simultaneously excite phtotoluminescence in semiconductor or insulating specimens. An atom probe equipped with appropriate focalization and collection optics has been coupled with an in-situ micro-Photoluminescence (μPL) bench that can be operated during APT analysis. The Photonic Atom Probe instrument we have developped operates at frequencies up to 500 kHz and is controlled by 150 fs laser pulses tunable in energy in a large spectral range (spanning from deep UV to near IR). Micro-PL spectroscopy is performed using a 320 mm focal length spectrometer equipped with a CCD camera for time-integrated and with a streak camera for time-resolved acquisitions. An exemple of application of this instrument on a multi-quantum well oxide heterostructure sample illustrates the potential of this new generation of tomographic atom probe.
