论文标题
紧凑型环谐振器增强了SI-on-SOI平台中的硅-MSM光电探测器
Compact Ring Resonator Enhanced Silicon-MSM Photodetector in SiN-on-SOI Platform
论文作者
论文摘要
我们提出了一个紧凑的芯片谐振器增强硅-MSM光电探测器，$ 850 $ $ nm $ $ nm $波长带，用于通信和实验室芯片生物感应应用程序。我们报告了5 $ $ $ $长的设备的最高响应率为0.81 A/W。通过将检测器整合在硝酸硅环谐振器中，可以实现高响应性。由于空腔增强，共振在单次通电器中提供了100倍的响应性提高。我们还介绍了有关腔和单通气检测器的高速响应的详细研究。我们报告使用飞秒光激发测量的7.5 GHz的电流带宽。据我们所知，我们首次在SIN-SOI平台中首次报告了氮化硅谐振器集成的Si-MSM探测器。
We present a compact on-chip resonator enhanced silicon-MSM photodetector in $850$ $nm$ wavelength band for communication and lab-on-chip bio-sensing applications. We report the highest responsivity of 0.81 A/W for a 5 $μm$ long device. High responsivity is achieved by integrating the detector in a silicon nitride ring resonator. The resonance offers 100X responsivity improvement over a single-pass photodetector due to cavity enhancement. We also present a detailed study of the high-speed response of the cavity and single-pass detector. We report an electro-optic bandwidth of 7.5 GHz measured using a femtosecond optical excitation. To the best of our knowledge, we report for the first time silicon nitride resonator integrated Si-MSM detector in SiN-SOI platform.
