论文标题
从高金色的bragg镜子中监视的湿法去除单个介电层
Monitored wet-etch removal of individual dielectric layers from high-finesse Bragg mirrors
论文作者
论文摘要
将定制的介电涂层存放在单个光学元件上是非常昂贵的。一种解决方案是将许多带有额外介电层的光学器件划分,然后根据需要从单个光学元件中删除层。在这里,我们提出了一种低成本,单步,受监控的湿蚀刻技术,用于可靠地删除(或部分删除)单个sio $ _2 $和ta $ _2 $ o $ $ _5 $ dielectric层,在这种情况下是从高反转纤维镜中。通过浸入酸中并监测带反射的光线,我们表明它直接到迭代(或连续)去除六个双层。在每个阶段,我们都以Fabry-Pérot腔体进行了表征,观察到预期的逐步减少了从92,000美元$ \ pm $ 3,000 $ 3,000降至3,950美元$ \ pm $ 50,没有发现添加光学损失的证据。蚀刻还可以在单个双层后去除纤维的侧壁涂层,在六个双层后,将剩余的涂层限制在纤维尖端中心的$ \ sim $ 50- $ 5 $ $ M $ M直径的基座。溶液上方的蒸气蚀刻会产生锥形的“泳池提示”覆层配置文件,以$ \ sim $ 0.3 $^\ $ circ的角度将纤维直径(名义上为125 $μ$ m)降低至$ \ sim $ 100 $μ$ m。最后,我们注意到该技术生成的数据提供了对层光学深度的敏感估计。该技术很容易适应自由空间光学元件和其他涂料。
It is prohibitively expensive to deposit customized dielectric coatings on individual optics. One solution is to batch-coat many optics with extra dielectric layers, then remove layers from individual optics as needed. Here we present a low-cost, single-step, monitored wet etch technique for reliably removing (or partially removing) individual SiO$_2$ and Ta$_2$O$_5$ dielectric layers, in this case from a high-reflectivity fiber mirror. By immersing in acid and monitoring off-band reflected light, we show it is straightforward to iteratively (or continuously) remove six bilayers. At each stage, we characterize the coating performance with a Fabry-Pérot cavity, observing the expected stepwise decrease in finesse from 92,000$\pm$3,000 to 3,950$\pm$50, finding no evidence of added optical losses. The etch also removes the fiber's sidewall coating after a single bilayer, and, after six bilayers, confines the remaining coating to a $\sim$50-$μ$m-diameter pedestal at the center of the fiber tip. Vapor etching above the solution produces a tapered "pool cue" cladding profile, reducing the fiber diameter (nominally 125 $μ$m) to $\sim$100 $μ$m at an angle of $\sim$0.3$^\circ$ near the tip. Finally, we note that the data generated by this technique provides a sensitive estimate of the layers' optical depths. This technique could be readily adapted to free-space optics and other coatings.