论文标题
外延氮化氮化物超导纳米线单光子探测器
Epitaxial niobium nitride superconducting nanowire single-photon detectors
论文作者
论文摘要
单光子探测器中使用的超导纳米线已在无定形或多晶膜上实现。在这里，我们报告使用单晶NBN薄膜用于超导纳米式单光子探测器（SNSPDS）。 NBN膜在几乎晶格匹配的Aln-Sapphire底物上，在高温下通过分子束外延（MBE）生长，其均匀性和同质性表现出很高的均匀程度。即使有了相对较厚的膜，制造的纳米线探测器在近红外波长处显示出饱和的内部效率，这表明MBE种植的NBN可能实现了大量的片上SNSPD阵列及其与基于ALN的$χ^{（2）} $量子量子光电通电的阵列的阵列。
Superconducting nanowires used in single-photon detectors have been realized on amorphous or poly-crystalline films. Here, we report the use of single-crystalline NbN thin films for superconducting nanowire single-photon detectors (SNSPDs). Grown by molecular beam epitaxy (MBE) at high temperature on nearly lattice-matched AlN-on-sapphire substrates, the NbN films exhibit high degree of uniformity and homogeneity. Even with relatively thick films, the fabricated nanowire detectors show saturated internal efficiency at near-IR wavelengths, demonstrating the potential of MBE-grown NbN for realizing large arrays of on-chip SNSPDs and their integration with AlN-based $χ^{(2)}$ quantum photonic circuits.
