论文标题
在错误逐渐降低基板上生长的表层外延倾斜的精致模型
A Refined Model for Epitaxial Tilt of Epilayers Grown on Miscut Substrates
论文作者
论文摘要
通过采用晶体建模和相互空间分析来解释外延倾斜(或阴道)底物上外延倾斜的起源模型。经常引用Nagai倾斜模型(H. Nagai,J。Appl。Phys。,45,3789(1974))来解释在沉积在错误的脱落底物上的假态层中晶格平面的倾斜,该层在高分辨率X射线衍射测量中观察到。但是,在这里,我们演示了该模型如何错误地描述底物如何将双轴应力应用于外延层。最重要的是,施加在误差底物上的外延层上的应力不是沿低索引平面。例如,名义上(001)的立方基材的表面平面朝[110)的平面是(118)平面,施加的应力沿(118)平面平行于(118)平面,而不是(001)。此外,在互惠空间的框架下,{00l}反射将是对轴上底物的对称反射,但对于误偏基底物的不对称反射。在低指数底物平面和外延层平面(((001))之间,倾斜的倾斜度(例如使用错误的底物)与将低指数反射视为不对称反射来预测的倾斜度匹配。提供了一个外延倾斜方程,该方程描述了基于晶格参数不匹配以及适用于任何晶体系统的层的泊松比以及底层层之间的倾斜度。
A refined model of the origin of epitaxial tilt on miscut (or vicinal) substrates is explained by employing crystal modeling and reciprocal space analysis. The Nagai tilt model (H. Nagai, J. Appl. Phys., 45, 3789 (1974)) is often cited to explain the tilt of lattice planes in a pseudomorphic layer deposited on a miscut substrate that is observed in high resolution x-ray diffraction measurements. Here, however, we demonstrate how that model incorrectly describes how the substrate applies biaxial stress onto the epitaxial layer. Most importantly, the stress applied to an epitaxial layer on a miscut substrate is not along a low index plane. For example, the surface plane of a nominally (001) cubic substrate with a miscut of 10° towards the [110] is the (118) plane and the stress applied is parallel along the (118) plane and not (001). Furthermore, under the framework of reciprocal space, the {00l} reflections would be symmetric reflections for on-axis substrates but asymmetric reflections for miscut substrates. The tilt that is experimentally observed between the low index substrate planes and the epitaxial layer planes ((001) for example with a miscut substrate) matches that which is predicted by treating the low index reflections as asymmetric reflections. An epitaxial tilt equation is provided which describes the tilt between epitaxial and substrate layers based on the lattice parameter mismatch as well as the Poisson ratio of the layer that is applicable to any crystal system.