论文标题
MEMS热通量传感器
MEMS Heat Flux Sensor
论文作者
论文摘要
热通量传感器在启用需要跟踪直接和瞬时热能传递的应用中具有潜力。为了促进其使用，传感器必须实现稳健且可行，同时保持高灵敏度和快速响应时间。但是，大多数市售的热通量传感器的制造价格昂贵，并且时间响应不足。在本文中，提出了一种新型的微电力热通量传感器结构。将原型传感器的电性能与市售的热通量传感器进行了比较。初步结果表明，与商业传感器相比，我们的传感器具有相似的灵敏度和更快的响应。
Heat flux sensors have potential in enabling applications that require tracking of direct and instantaneous thermal energy transfer. To facilitate their use, the sensors have to be robust and feasible to implement, while maintaining high sensitivity and a fast response time. However, most commercially available heat flux sensors are expensive to manufacture and have insufficient temporal responses. In this paper, a novel microelectromechanical heat flux sensor structure is proposed. The electrical performance of the prototype sensors is compared with commercially available heat flux sensors. Preliminary results show that our sensors have similar sensitivity and faster response compared to commercial sensors.
