论文标题
Hipims的结构,电子和磁性生长的Co-N薄膜
Structural, Electronic, and Magnetic Properties of HiPIMS Grown Co-N Thin Films
论文作者
论文摘要
我们研究了使用直流电流(DC)和高功率脉冲磁铁溅射(HIPIMS)工艺沉积的硝酸钴(CO-N)薄膜的生长行为,结构,电子和磁性。 n $ _2 $部分气体流(\ pn)在紧密的间隔中变化,以达到氮钴(\ tcn)相的最佳条件。我们发现,与在DCMS过程中(100)方向发生的增长相比,使用HIPIMS工艺生长的Co-N膜采用(111)方向。据观察,在晶体大小和均匀的表面形态方面,生长的co-n〜薄膜成长的薄膜较高。使用X射线吸收精细结构(XAFS)测量研究了膜的局部结构。我们发现,HIPIMS技术中Adatom的高能量有助于相对于DCMS工艺的FCC-CO和新型\ TCN〜相的更大稳定。使用磁光kerr效应,振动样品磁力测定法和偏振中子反射率研究了Co-N薄膜的磁性能。已经发现,尽管DCM或HIPIMS过程生长的膜中的饱和磁化几乎保持相似,但它们在磁各向异性方面有所不同。可以从DCMS和HIPIMS过程中影响\ TCN〜相的局部结构的生长机制的差异来理解这种差异。
We studied the growth behavior, structural, electronic, and magnetic properties of cobalt nitride (Co-N) thin films deposited using direct current (dc) and high power impulse magnetron sputtering (HiPIMS) processes. The N$_2$ partial gas flow (\pn) was varied in close intervals to achieve the optimum conditions for the growth of tetra cobalt nitride (\tcn) phase. We found that Co-N films grown using HiPIMS process adopt (111) orientation as compared to the growth taking place along the (100) direction in the dcMS process. It was observed that HiPIMS grown Co-N~films were superior in terms of crystallite size and uniform surface morphology. The local structure of films was investigated using x-ray absorption fine structure (XAFS) measurements. We found that the high energy of adatoms in the HiPIMS technique assisted in the greater stabilization of fcc-Co and novel \tcn~phase relative to the dcMS process. Magnetic properties of Co-N thin films were studied using magneto-optical Kerr effect, vibrating sample magnetometry and polarized neutron reflectivity. It was found that though the saturation magnetization remains almost similar in films grown by dcMS or HiPIMS processes, they differ in terms of their magnetic anisotropy. Such variation can be understood in terms of differences in the growth mechanisms in dcMS and HiPIMS processes affecting the local structure of resulting \tcn~phase.