论文标题
膜三明治挤压膜压力传感器
Membrane sandwich squeeze film pressure sensors
论文作者
论文摘要
挤压膜压力传感器，利用由于小间隙区域中流体压缩而导致振荡元件的机械性能的动力学修饰，可以进行直接和绝对的压力测量。这篇教程文章讨论了膜三明治挤压膜压力传感器的工作原理，即，传感器由两个大面积的平行布置组成，超薄的超薄悬浮膜形成了几个微调缝隙并浸入流体中，并专注于它们在自由流动方程中的操作。在提出了使用高拉伸应力硅膜膜的最新实验实现之前，讨论了气压对膜谐振器及其耦合动力学振动的影响。
Squeeze film pressure sensors, exploiting the dynamical modification of the mechanical properties of oscillating elements due to the compression of a fluid in a small gap region, allow for direct and absolute pressure measurements. This tutorial article discusses the working principles of membrane sandwich squeeze film pressure sensors, i.e. sensors consisting in a parallel arrangement of two large area, ultrathin suspended films forming a few-micron gap and immersed in a fluid, and focuses on their operation in the free molecular flow regime. The effects of gas pressure on the vibrations of the membrane resonators and their coupled dynamics are discussed in general terms before recent experimental implementations using high tensile stress silicon nitride membranes are presented.
