论文标题
扫描透射电子显微镜中的快速像素化检测器。第二部分：收购后数据处理，可视化和结构表征
Fast Pixelated Detectors in Scanning Transmission Electron Microscopy. Part II: Post Acquisition Data Processing, Visualisation, and Structural Characterisation
论文作者
论文摘要
结合直接电子检测（DED）技术的快速像素化检测器被越来越被视为扫描传输电子显微镜（STEM）的通用检测器，能够在多种操作模式下进行成像。但是，在收购后处理和可视化它们通常会产生的多维茎数据集的可视化以及可视化周围仍然存在一些问题。我们讨论这些问题并提出开源软件库，以实现此类数据集的有效处理和可视化。在整个过程中，我们提供了呈现的分析方法的示例，利用来自256 $ \ times $ 256 Pixel Medipix3 Hybrid Ded Tectecter的数据，特别关注材料结构特性的茎表征。这些包括虚拟探测器成像的技术；高阶LAUE区分析；纳米氨基电子衍射；并扫描进动电子衍射。在后者中，我们用分数精度$ \ le 6 \ times10^{ - 4} $（0.06％）演示了纳米级晶格参数映射。
Fast pixelated detectors incorporating direct electron detection (DED) technology are increasingly being regarded as universal detectors for scanning transmission electron microscopy (STEM), capable of imaging under multiple modes of operation. However, several issues remain around the post acquisition processing and visualisation of the often very large multidimensional STEM datasets produced by them. We discuss these issues and present open source software libraries to enable efficient processing and visualisation of such datasets. Throughout, we provide examples of the analysis methodologies presented, utilising data from a 256$\times$256 pixel Medipix3 hybrid DED detector, with a particular focus on the STEM characterisation of the structural properties of materials. These include the techniques of virtual detector imaging; higher order Laue zone analysis; nanobeam electron diffraction; and scanning precession electron diffraction. In the latter, we demonstrate nanoscale lattice parameter mapping with a fractional precision $\le 6\times10^{-4}$ (0.06%).
