论文标题
CMS外部跟踪器和高粒度量热仪的2期升级的过程质量控制策略
Process Quality Control Strategy for the Phase-2 Upgrade of the CMS Outer Tracker and High Granularity Calorimeter
论文作者
论文摘要
在2025年至2027年之间，将升级CMS（紧凑型MUON电磁阀）检测器的某些必需组件（紧凑型MUON电磁阀）检测器（最著名的是跟踪器和热量表端盖），以准备HL -LHC（高亮度大型HADRON COLLITER）条件。升级的CMS外部跟踪器和新的CMS高粒度热量计（HGCAL）的一部分将包括超过$ 50 {，} 000 $的新硅传感器，总面积约为$ 800 \，\ text {M}^{2} $。传感器系列生产需要一种专门的策略来监视生产过程的质量和稳定性。该策略基于测试结构集，可快速轻松访问关键过程参数。这些包括在传感器上无法直接访问的参数（例如氧化物电荷浓度和界面陷阱密度）和需要潜在破坏性测量的参数（例如介电强度）。该集合在每个生产晶片上至少实现了两次。它分为测试结构，以初步评估最相关的过程参数和结构，以进行深入分析。可以使用20针探针卡和自动定位阶段联系所有结构。使用此系统，大约30分钟内可以对一个晶片进行初始分析。在本文中，CMS协作介绍了第二阶段升级的质量保证计划，重点是过程质量控制。我们涵盖了传感器过程的细节，将在CMS外部跟踪器和HGCAL生产运行中实现的测试结构集的布局，测量结果说明了随附的测试结构的功能。
Between 2025 and 2027, some essential components of the CMS (Compact Muon Solenoid) detector - most notably the tracker and the calorimeter endcap - will be upgraded to prepare for HL-LHC (High Luminosity Large Hadron Collider) conditions. The upgraded CMS Outer Tracker and parts of the new CMS High Granularity Calorimeter (HGCAL) will encompass over $50{,}000$ new silicon sensors covering a total area of about $800\,\text{m}^{2}$. The sensor series production requires a dedicated strategy to monitor the quality and stability of the production process. The strategy is based on a test structure set that provides quick and easy access to critical process parameters. These include parameters not directly accessible on the sensors (e.g. oxide charge concentration and interface trap density) and parameters requiring potentially destructive measurements (e.g. dielectric strength). The set is implemented at least twice on each production wafer. It is divided into test structures for initial evaluation of the most relevant process parameters and structures for in-depth analysis. All structures can be contacted using a 20-needle probe card and an automated positioning stage. With this system, the initial analysis of one wafer is possible in about 30 minutes. In this paper, the CMS collaboration presents the quality assurance plan for the Phase-2 Upgrade with a focus on process quality control. We cover sensor process specifics, the layout of the test structure set that will be implemented in the production runs for the CMS Outer Tracker and HGCAL, and measurement results illustrating the functionality of the included test structures.
