论文标题
通过内部模式耦合
Giant enhancement in the thermal responsivity of microelectromechanical resonators by internal mode coupling
论文作者
论文摘要
我们通过使用内部模式耦合效果来报道双斜GAAS微电动机电（MEMS）光束谐振器的热响应量的巨大增强。这是通过将基本弯曲模式与MEMS光束谐振器的基本扭转模式结合到通过立方悬挂非线性的基本扭转模式来实现的。在模式耦合方案中，我们发现，当对MEMS谐振器的输入热以特定频率调制时，通过加热引起的谐振频率可以通过近两个数量级来增强。观察到的效果有望通过使用MEMS共振器（例如在室温下检测到超敏感性的Terahertz检测）来实现高敏性热感应。
We report on a giant enhancement in the thermal responsivity of the doubly-clamped GaAs microelectromechanical (MEMS) beam resonators by using the internal mode coupling effect. This is achieved by coupling the fundamental bending mode with the fundamental torsional mode of the MEMS beam resonators through the cubic Duffing nonlinearity. In the mode coupling regime, we have found that, when the input heat to the MEMS resonators is modulated at a particular frequency, the resonance frequency shift caused by heating can be enhanced by almost two orders of magnitude. The observed effect is promising for realizing high-sensitivity thermal sensing by using MEMS resonators, such as ultrasensitive terahertz detection at room temperature.
