论文标题
显微镜投影光刻基于液态晶体微型玩具
Microscope Projection Photolithography Based on Liquid Crystal Microdisplay
论文作者
论文摘要
我们开发了一种基于微观的显微镜投影光刻（MDMPP）技术，其中液晶（LC）微型播放用作显微镜投影仪的可重构光掩码。 LC微型播放在成本和速度方面提供了重要的优势，因为可以通过软件而不是重新设计和制造玻璃光包来生成模式。构造的MDMPP系统可以产生狭窄的线模式，范围为2.4 um，比借助4倍物镜镜头的衍射极限所指定的线模式小。除了系统的良好光学性能之外，还可以将小于理论极限的线宽实现归因于过度暴露和下调效果的组合。在通过制造的缝隙进行的衍射实验中，MDMPP技术的应用有助于提供各种模式，证明了MDMPP系统在本科光学课程中的潜在有用性。我们预计MDMPP将来可以为物理教育和各种研究领域（例如化学和生物学领域）做出贡献。
We developed a microdisplay-based microscope projection photolithography (MDMPP) technique in which a liquid crystal (LC) microdisplay is used as a reconfigurable photomask for a microscope projector. The LC microdisplay provides a significant advantage in terms of cost and speed since patterns can be generated through software instead of redesigning and fabricating glass photomasks. The constructed MDMPP system could produce line patterns as narrow as 2.4 um, smaller than that specified by the diffraction limit, with the aid of a 4X objective lens. The achievement of a linewidth smaller than the theoretical limit may be ascribed to a combination of overexposure and the underetching effect, in addition to the good optical performance of the system. In a diffraction experiment performed with fabricated slits, the application of the MDMPP technique helped provide various patterns of the slits, demonstrating the potential usefulness of the MDMPP system in undergraduate optics courses. We expect that MDMPP can contribute to the field of physics education and various areas of research, such as chemistry and biology, in the future.
