论文标题
独立式氮化硅膜中的辐射传热
Radiative Heat Transfer in Free-Standing Silicon Nitride Membranes
论文作者
论文摘要
独立式氮化硅（SIN）机械谐振器在温度和质量传感等应用中具有核心利益，以及基本的光学机械探测。需要了解膜谐振器及其环境之间的热耦合才能预测热噪声，频率噪声以及传感器对温度变化的响应。在这项工作中，我们提供了独立型薄膜中固有热耦合量的封闭形式推导，即周围环境，热响应时间以及热辐射的相对贡献。我们的模型对于锚定在各个侧面的任何独立薄膜都是有效的，尽管我们特别强调了罪恶的特定情况，该案例的光谱发射率是厚度和温度的函数。我们发现，辐射热交换可以发挥不可忽略的作用，甚至在光学机械实验中常用大小的膜的热耦合占主导地位。我们通过测量高真空吸尘器中的罪恶机械谐振器和陶瓷加热器之间的辐射热耦合，从实验中确认了模型的有效性。
Free-standing silicon nitride (SiN) mechanical resonators are of central interests in applications such as temperature and mass sensing, and for fundamental optomechanical reasearch. Understanding thermal coupling between a membrane resonator and its environment is required for predicting thermal noise, frequency noise, as well as sensors responses to temperature changes. In this work, we provide closed-form derivations of intrinsic thermal coupling quantities in free-standing thin films, namely total thermal conductance with the surroundings, thermal response time, and the relative contribution of thermal radiation. Our model is valid for any free-standing thin film anchored on all sides, although we particularly emphasize the specific case of SiN for which spectral emissivity is thoroughly investigated as a function of thickness and temperature. We find that radiative heat exchanges can play a non-negligible role, and even dominate thermal coupling for membranes of sizes commonly employed in optomechanics experiments. We experimentally confirm the validity of our model by measuring radiative thermal coupling between a SiN mechanical resonator and a ceramic heater in high vacuum.
