论文标题
使用铝掺杂的ZnO元图的氢气传感
Hydrogen gas sensing using aluminum doped ZnO metasurface
论文作者
论文摘要
在各种领域,例如工业,环境,能源和生物医学应用,氢感应至关重要。但是,工程是一种实用,可靠,快速,敏感和具有成本效益的氢传感器,这是一个持续的挑战。在这里,我们使用基于光学读出的铝掺杂氧化锌(Azo)元额叶进行氢感测。所提出的传感系统由位于沉积在Si晶片上的SIO2层上的高度有序的偶氮纳米管(空心柱)组成。暴露于氢气后,AZO纳米管系统在10分钟内显示出最小反射率的波长在10分钟内,氢浓度为4%。这些偶氮纳米管还可以在10分钟内感觉到低浓度(0.7%)的存在。即使对于低浓度,它的迅速响应时间,具有良好精确度的大传感面积制造的可能性,并且在室温下高灵敏度使这些高度有序的纳米管结构成为有希望的微型H2气体传感器。
Hydrogen sensing is crucial in a wide variety of areas, such as industrial, environmental, energy and biomedical applications. However, engineering a practical, reliable, fast, sensitive and cost-effective hydrogen sensor, is a persistent challenge. Here we demonstrate hydrogen sensing using aluminum-doped zinc oxide (AZO) metasurfaces based on optical read-out. The proposed sensing system consists of highly ordered AZO nanotubes (hollow pillars) standing on a SiO2 layer deposited on a Si wafer. Upon exposure to hydrogen gas, the AZO nanotube system shows a wavelength shift in the minimum reflectance by 13 nm within 10 minutes for a hydrogen concentration of 4%. These AZO nanotubes can also sense the presence of a low concentration (0.7 %) of hydrogen gas within 10 minutes. Its rapid response time even for low concentration, the possibility of large sensing area fabrication with good precision, and high sensitivity at room temperature make these highly ordered nanotube structures a promising miniaturized H2 gas sensor.